60MW Drying Firing Furnace

The Despatch 60MW infrared drying/firing furnace is designed for maximum throughput, consistent process repeatability and maximum equipment up-time resulting in consistently high yields, superior product quality and reduced cost of ownership. .

In addition to these exceptional performance capabilities, this model features a touchscreen graphical user interface, eye-level electronics access, and the first of its kind push-button chamber access. These innovations make it easy to use, maximize performance and up time and allow you to continually improve your results.

Standard Features

• Rapid thermal ramping (>80°C/sec)
• Enhanced thermal cooling (>70°C/sec) Closed loop temperature controls
• Enhanced software recipe management
• Touchscreen graphical user interface
• Master production control interface
• Data logging
• Redundant over-temperature shutdown
• Minimized wafer shadowing design
• Safe, simple chamber accessibility
• Eye-level electronics for easy maintainability

Options

• Water-cooled heat exchanger
• Failed element monitor
• Profiling systems
• Water-cooled volatile organic compound (VOC) condenser
• Ultrasonic belt cleaner/dryer
• Uninterruptible power supply
• Custom belt widths
• Mesh belt with stand-off (dimple) supports
• Integration to wafer automation equipment