DCF Series - Integrated In-line Diffusion System

Integrated, In-line Diffusion System

The new, Integrated, In-line Diffusion System is Despatch's latest addition to the company's photovoltaic product portfolio. The new in-line diffusion systems are designed to consistently deliver highly homogeneous emitters that are critical for creating high efficiency solar cells.

The production of the DCF Systems represents an important advance in the solar cell manufacturing process by integrating the following into one single piece of equipment:

• A patent-pending, in-line phosphorus doper that utilizes top and bottom spray technology
• An infrared diffusion furnace featuring a patent-pending thermal processing chamber
• Critical process technology

The new integrated systems are recognized for superior thermal processing control, improved cost of ownership, value-added feature sets and ease of maintenance. These special features provide customers with high throughputs and maximum yields.

Standard Features

• ECN process technology license
• High volume production
• Simultaneous top and bottom wafer coating
• Closed loop temperature controls
• Advanced graphical user interface
• Safe, simple chamber accessibility
• High production up-time
• Ease of maintenance

In-line Phosphorus Doping:

• Simultaneous top and bottom phosphorus coating
• Dopant chamber environmental control
• Direct connect dopant facility supply connection
• Variable speed control
• Adjustable phosphorus application

In-line Furnace:

• Tight temperature control for maximum process window
• Maximum up-time for higher yields
• Process profiles for high efficiency solar cells

Integrated Process Control System:

• Doper/Furnace recipe creation
• Process window monitoring with audible and visual alarming
• Real-time process window display
• Data logging
• Process repeatability – 8 minutes, 8 hours, 8 day

Options

• Water-cooled heat exchanger
• Failed element monitor
• Master production control interface
• Profiling systems
• Ultrasonic belt cleaner/dryer
• Uninterruptible power supply
• Extended process profiles
• Conveyor table extensions

Wafer loading options:

• Buffering tool
• Direct connection to in-line texturing tool and/or PSG glass removal tools
• Manual load
• CE Compliance