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Tool Conditioning Oven |
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The Despatch Tool Conditioning Oven keeps semiconductor parts and tooling clean, dry, and ready for immediate installation. It is specifically designed for atmosphere controlled storage of parts, tooling, and deposition targets.
Controlled Atmosphere - HEPA filters deliver better than Class 100 conditions. A clean, dry, nitrogen atmosphere ensures that the parts are not exposed to water vapors. Horizontal airflow provides uniform temperatures ranging from ambient to 95°C.
Padded Roll-out Shelves - The shelves are specially designed for semiconductor parts and tooling. A sturdy, roll-out design facilitates loading and unloading of heavy parts. Teflon padding eliminates damage from scratching and abrasion. (Standard on 300mm units; optional on 200mm units.)
200mm and 300mm Sizes - Ovens are available in sizes designed for either 200mm or 300mm tools.
Despatch Quality - Each oven receives a thorough quality and performance test before shipment. If desired, the oven can be cleaned and triple bagged in a clean room environment, assuring fast, contaminant-free installation in your cleanroom.
Features
- Class 100 conditions
- Nitrogen atmosphere
- Temperatures to 95 °C
- Teflon protected roll-out shelves are standard on the 300mm units and optional on the 200mm units
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Produktaufnahmen
Produktbeschreibung, Optionen und Spezifikationen
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